| On the breakdown statistics of very thin SiO2 films J Suńé, I Placencia, N Barniol, E Farrés, F Martin, X Aymerich Thin solid films 185 (2), 347-362, 1990 | 304 | 1990 |
| Electromechanical model of a resonatingnano-cantilever-based sensor for high-resolution and high-sensitivity mass detection G Abadal, ZJ Davis, B Helbo, X Borrise, R Ruiz, A Boisen, F Campabadal, ... Nanotechnology 12 (2), 100, 2001 | 180 | 2001 |
| Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range J Verd, A Uranga, G Abadal, JL Teva, F Torres, J Lopez, F Perez-Murano, ... IEEE electron device letters 29 (2), 146-148, 2008 | 159 | 2008 |
| Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva, J Verd, R Sandberg, ... Applied Physics Letters 87 (4), 2005 | 153 | 2005 |
| Nanometer‐scale oxidation of Si (100) surfaces by tapping mode atomic force microscopy F Pérez‐Murano, G Abadal, N Barniol, X Aymerich, J Servat, P Gorostiza, ... Journal of applied physics 78 (11), 6797-6801, 1995 | 126 | 1995 |
| AFM lithography of aluminum for fabrication of nanomechanical systems ZJ Davis, G Abadal, O Hansen, X Borise, N Barniol, F Perez-Murano, ... Ultramicroscopy 97 (1-4), 467-472, 2003 | 113 | 2003 |
| CMOS–MEMS resonators: From devices to applications A Uranga, J Verd, N Barniol Microelectronic Engineering 132, 58-73, 2015 | 111 | 2015 |
| Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres, A Uranga, G Abadal, ... Journal of Micromechanics and Microengineering 19 (1), 015002, 2008 | 110 | 2008 |
| Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit J Verd, G Abadal, J Teva, MV Gaudó, A Uranga, X Borrisé, F Campabadal, ... Journal of microelectromechanical systems 14 (3), 508-519, 2005 | 98 | 2005 |
| Nondestructive multiple breakdown events in very thin SiO2 films J Suńé, E Farrés, I Placencia, N Barniol, F Martín, X Aymerich Applied Physics Letters 55 (2), 128-130, 1989 | 97 | 1989 |
| Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications J Verd, A Uranga, J Teva, JL Lopez, F Torres, J Esteve, G Abadal, ... IEEE Electron Device Letters 27 (6), 495-497, 2006 | 92 | 2006 |
| A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High-22-MHz Polysilicon Clamped-Clamped Beam Resonators JL Lopez, J Verd, A Uranga, J Giner, G Murillo, F Torres, G Abadal, ... IEEE Electron Device Letters 30 (7), 718-720, 2009 | 86 | 2009 |
| Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions J Verd, A Uranga, G Abadal, J Teva, F Torres, F Pérez-Murano, ... Applied physics letters 91 (1), 2007 | 84 | 2007 |
| Modification of HF‐treated silicon (100) surfaces by scanning tunneling microscopy in air under imaging conditions N Barniol, F Pérez‐Murano, X Aymerich Applied Physics Letters 61 (4), 462-464, 1992 | 75 | 1992 |
| Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories A Uranga, J Verd, E Marigó, J Giner, JL Muńóz-Gamarra, N Barniol Sensors and Actuators A: Physical 197, 88-95, 2013 | 73 | 2013 |
| Field induced oxidation of silicon by SPM: study of the mechanism at negative sample voltage by STM, ESTM and AFM. G Abadal, F Perez-Murano, N Barniol, X Aymerich Applied Physics A: Materials Science & Processing 66 (7), 1998 | 73 | 1998 |
| Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry ZJ Davis, G Abadal, B Helbo, O Hansen, F Campabadal, F Pérez-Murano, ... Sensors and Actuators A: Physical 105 (3), 311-319, 2003 | 68 | 2003 |
| System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection M Villarroya, J Verd, J Teva, G Abadal, E Forsen, FP Murano, A Uranga, ... Sensors and Actuators A: Physical 132 (1), 154-164, 2006 | 67 | 2006 |
| Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators H Campanella, J Esteve, J Montserrat, A Uranga, G Abadal, N Barniol, ... Applied physics letters 89 (3), 2006 | 66 | 2006 |
| Nanometer scale lithography of silicon (100) surfaces using tapping mode atomic force microscopy J Servat, P Gorostiza, F Sanz, F Pérez‐Murano, N Barniol, G Abadal, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (3 …, 1996 | 55 | 1996 |
arantxa urangaTitular de Universidad, Universitat Autňnoma de BarcelonaVerified email at uab.es
